ION BEAM STABILIZATION

Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.

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Bibliographische Detailangaben
Hauptverfasser:	FARKAS, LOUIS, S., III, NOTTE, JOHN, A., IV, RAHMAN, M-FARIDUR
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.