Microphone device with accelerometer for vibration compensation

A microphone and a method for manufacturing the same is presented. The microphones comprises a substrate die (24); and a microphone (20) and an accelerometer (22) formed from the substrate die. The accelerometer is adapted to provide a signal for compensating mechanical vibrations of the substrate d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PJINENBURG, REMCO, LANGEREIS, GEERT, VAN LIPPEN, TWAN, BONIMAR-SILKENS, IRIS, TARASHIOON, SIMA
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A microphone and a method for manufacturing the same is presented. The microphones comprises a substrate die (24); and a microphone (20) and an accelerometer (22) formed from the substrate die. The accelerometer is adapted to provide a signal for compensating mechanical vibrations of the substrate die.