Microphone device with accelerometer for vibration compensation
A microphone and a method for manufacturing the same is presented. The microphones comprises a substrate die (24); and a microphone (20) and an accelerometer (22) formed from the substrate die. The accelerometer is adapted to provide a signal for compensating mechanical vibrations of the substrate d...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A microphone and a method for manufacturing the same is presented. The microphones comprises a substrate die (24); and a microphone (20) and an accelerometer (22) formed from the substrate die. The accelerometer is adapted to provide a signal for compensating mechanical vibrations of the substrate die. |
---|