METHOD FOR PRODUCING A GETTER DEVICE
The invention relates to a method for producing a getter device (1), wherein a getter material (3) is introduced into a container (2) and the getter material (3) is heated to a temperature under reduced pressure so that getter material (3) is deposited on an inside of the container (2). In order to...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a method for producing a getter device (1), wherein a getter material (3) is introduced into a container (2) and the getter material (3) is heated to a temperature under reduced pressure so that getter material (3) is deposited on an inside of the container (2). In order to be able to provide a getter device (1) in a short time that has a high getter capacity, it is provided according to the invention that during a deposition of getter material (3), the container (2) is moved relative to a zone (4) in which the container (2) is cooled. |
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