Gallium nitride substrate
A gallium nitride (GaN) substrate hard to break and capable of enhancing a production yield is provided. The GaN substrate comprises a primary surface. The primary surface is tilted at an angle in the range of 20 to 160 degrees with respect to the C-plane of the substrate. The substrate has a fractu...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A gallium nitride (GaN) substrate hard to break and capable of enhancing a production yield is provided. The GaN substrate comprises a primary surface. The primary surface is tilted at an angle in the range of 20 to 160 degrees with respect to the C-plane of the substrate. The substrate has a fracture toughness of more than or equal to 1.36 MN/m 3/2 . |
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