SHORT THERMAL PROFILE OVEN USEFUL FOR SCREEN PRINTING

The present invention(s) provide an apparatus and method for efficiently drying material deposited on a substrate surface. The apparatus and methods described herein may be useful for removing a solvent type material from a material deposited on a surface of a substrate. In some cases the material may be deposited using a screen printing process. In one embodiment, a screen printing chamber is adapted to deposit a patterned material on a crystalline silicon substrate and then dry the deposited material in a drying chamber. In one embodiment, the screen printing chamber and the drying chamber are both positioned within the Rotary line tool or the Softline(TM) tool available from Baccini S.p.A., which is owned by Applied Materials, Inc. of Santa Clara, Calif.