Electromechanical actuator with interdigital electrodes
The actuator has two sets of parallel conductive plates e.g. movable plates (PM) and fixed plates (PF) respectively provided on a movable element and a plane substrate (10). The sets of the plates are interdigitated symmetrically with each other and mutually covered on a portion of height such that...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | The actuator has two sets of parallel conductive plates e.g. movable plates (PM) and fixed plates (PF) respectively provided on a movable element and a plane substrate (10). The sets of the plates are interdigitated symmetrically with each other and mutually covered on a portion of height such that electric control voltage applied between the plates produces electrostatic force having a component along the height of the plates. Opposed ends of the movable plates are mechanically and electrically secured with end crosspieces (22, 24) facing opposed ends of the fixed plates. |
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