METHOD FOR DEPOSITING A SCRATCH PROTECTION COATING ON A PLASTIC SUBSTRATE

The invention relates to a method for depositing a transparent scratch protection coating on a plastic substrate by means of plasma-enhanced chemical vapor deposition (PECVD), wherein at least one metal organic precursor and at least one reactive gas are fed into a vacuum chamber, wherein the plasma...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FAHLAND, MATTHIAS, GLOESS, DANIEL, TAESCHNER, KERSTIN, GOTTFRIED, CHRISTIAN, BARTZSCH, HAGEN, FRACH, PETER
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention relates to a method for depositing a transparent scratch protection coating on a plastic substrate by means of plasma-enhanced chemical vapor deposition (PECVD), wherein at least one metal organic precursor and at least one reactive gas are fed into a vacuum chamber, wherein the plasma is generated by means of a pulsed magnetron, and at least one layer having continuous or abrupt changes with regard to layer composition is deposited.