METHOD FOR DEPOSITING A SCRATCH PROTECTION COATING ON A PLASTIC SUBSTRATE
The invention relates to a method for depositing a transparent scratch protection coating on a plastic substrate by means of plasma-enhanced chemical vapor deposition (PECVD), wherein at least one metal organic precursor and at least one reactive gas are fed into a vacuum chamber, wherein the plasma...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a method for depositing a transparent scratch protection coating on a plastic substrate by means of plasma-enhanced chemical vapor deposition (PECVD), wherein at least one metal organic precursor and at least one reactive gas are fed into a vacuum chamber, wherein the plasma is generated by means of a pulsed magnetron, and at least one layer having continuous or abrupt changes with regard to layer composition is deposited. |
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