INTERCONNECT STRUCTURE FOR INTEGRATED CIRCUITS HAVING IMPROVED ELECTROMIGRATION CHARACTERISTICS AND METHOD OF MAKING SUCH STRUCTURE

An interconnect structure for an integrated circuit (IC) device includes an elongated, electrically conductive line comprising one or more segments formed at a first width, w1, and one or more segments formed at one or more additional widths, w2 . . . wN, with the first width being narrower than eac...

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Bibliographische Detailangaben
Hauptverfasser: GRUNOW, Stephan, SIMON, Andrew, H, STANDAERT, Theodorus, SANKARAN, Sujatha, CHANDRA, Kaushik, FILIPPI, Ronald, HU, Chao-Kun
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An interconnect structure for an integrated circuit (IC) device includes an elongated, electrically conductive line comprising one or more segments formed at a first width, w1, and one or more segments formed at one or more additional widths, w2 . . . wN, with the first width being narrower than each of the one or more additional widths; wherein the relationship of the total length, L1, of the one or more conductive segments formed at the first width to the total lengths, L2 . . . LN, of the one or more conductive segments formed at the one or more additional widths is selected such that, for a given magnitude of current carried by the conductive line, a critical length with respect to an electromigration short-length effect benefit is maintained such that a total length of the conductive line, L=L1+L2+ . . . +LN, meets a minimum desired design length regardless of the critical length.