Sample processing system

An apparatus comprising a sample processing system (600) is disclosed. The sample processing system (600) is adapted to perform independent, environmentally-controlled processing for samples on multiple substrates using different processing protocols simultaneously.

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Bibliographische Detailangaben
Hauptverfasser: IQBAL, SHAHZI, CHANG, WALLACE, KALRA, KRISHAN L, MELKOTE, RAVISHANKAR
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:An apparatus comprising a sample processing system (600) is disclosed. The sample processing system (600) is adapted to perform independent, environmentally-controlled processing for samples on multiple substrates using different processing protocols simultaneously.