Silicon carbide dimpled substrate

Silicon carbide dimpled substrate

A substrate is disclosed. It comprises: a first layer having a first main surface and a second main surface opposing the first main surface; an active layer on the first main surface of the first layer; an array of dimples extending from the second main surface into the first layer toward the first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BALKAS, CENGIZ, HARRIS, CHRISTOPHER, BASCERI, CEM, GEHRKE, THOMAS
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate is disclosed. It comprises: a first layer having a first main surface and a second main surface opposing the first main surface; an active layer on the first main surface of the first layer; an array of dimples extending from the second main surface into the first layer toward the first main surface; and a metallization layer overlying the second main surface of the first layer and within the dimples.