A lithographic system including a chucking system

A chucking system to hold a substrate, said chucking system comprising: a chuck body (42) having first and second opposed sides (46, 48) with an edge surface (50) extending therebetween, said first side (46) including first and second spaced-apart recesses (52, 54) defining first and second spaced-a...

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Bibliographische Detailangaben
Hauptverfasser:	WATTS, MICHAEL, P.C, SREENIVASAN, SIDLGATA, V, CHOI, BYUNG, JIN, BABBS, DANIEL, A, VOISIN, RONALD, D, SCHUMAKER, NORMAN, E, MEISSL, MARIO J, BAILEY, HILLMAN, L
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HAND TOOLS HOLOGRAPHY MANIPULATORS MATERIALS THEREFOR MICROSTRUCTURAL TECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PORTABLE POWER-DRIVEN TOOLS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FORFASTENING, CONNECTING, DISENGAGING OR HOLDING TRANSPORTING
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Beschreibung
Zusammenfassung:	A chucking system to hold a substrate, said chucking system comprising: a chuck body (42) having first and second opposed sides (46, 48) with an edge surface (50) extending therebetween, said first side (46) including first and second spaced-apart recesses (52, 54) defining first and second spaced-apart support regions (58, 60), with said first support region (58) cincturing said second support region (60) and said first and second recesses (52, 54), and said second support region (60) cincturing said second recess (54), with a portion (62) of said chuck body (42) in superimposition with said second recess (54) being transparent to actinic radiation having a predetermined wavelength, said portion extending from said second side (48) and terminating proximate to said second recess (54), said second side and said edge surface defining exterior surfaces, with said chuck body (42) including a throughway (64, 66) extending through said chuck body placing one of said first and second recesses (52, 54) in fluid communication with one of said exterior surfaces.