Optical system with segmented pupil function

A method for designing a pupil function for use in an imaging system, comprising: selecting a pupil function; calculating a sampled PSF, taking into account characteristics of the imaging system and the pupil function; evaluating the sampled PSF in accordance with a selected metric; and if the sampl...

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Bibliographische Detailangaben
Hauptverfasser: FAN, REGIS S, KUBALA, KENNETH, S, DOWSKI, EDWARD, R
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method for designing a pupil function for use in an imaging system, comprising: selecting a pupil function; calculating a sampled PSF, taking into account characteristics of the imaging system and the pupil function; evaluating the sampled PSF in accordance with a selected metric; and if the sampled PSF does not conform within the selected metric, then modifying the pupil function, using a set of parameter modifications, and repeating the evaluating and modifying of the pupil function until the sampled PSF conforms within the selected metric.