MEASUREMENT ERROR CORRECTING METHOD AND ELECTRONIC PART CHARACTERISTIC MEASURING INSTRUMENT

Provided are a method for correcting measurement errors and an electronic component characteristics measurement device that can improve the correction precision by eliminating the correction errors caused by leakage signal components between the ports of the measurement jigs. An equation CA ij that...

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1. Verfasser: MORI, Taichi
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided are a method for correcting measurement errors and an electronic component characteristics measurement device that can improve the correction precision by eliminating the correction errors caused by leakage signal components between the ports of the measurement jigs. An equation CA ij that correlates measurement values in a test measurement jig mounted state with measurement values in a standard measurement jig mounted state is determined from a result of measuring electric characteristics S D , S T on correction data obtaining samples having different electric characteristics with each other in a state in which they are mounted on a standard measurement jig 20 and on a test measurement jig 30. The equation CA ij is an equation that assumes presence of leakage signals that are directly transmitted between at least two ports of at least one of the standard measurement jig and the test measurement jig. By using the equation CA ij determined by measuring the electric characteristics on an arbitrary electronic component in a state in which it is mounted on the test measurement jig 30, the electric characteristics that would be obtained if measured on the electronic component in a state in which it is mounted on the standard measurement jig 20 are calculated.