METHOD FOR PREPARING A DEPOSITION FROM A VAPOUR

The invention is directed to a method for preparing a deposition on a substrate and to a method for manufacturing an electronic or optoelectronic device. The method of the invention comprises - providing an anode comprising electrolytically ionisable material and a cathode both in contact with an el...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BLOKLAND, HUIBERT, BRESSERS, PETRUS MARINUS MARTINUS CORNELUS, VELTHUIS, JOHANNES FRANSISCUS MARIA, ROELANDS, CORNELIS PETRUS MARCUS
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention is directed to a method for preparing a deposition on a substrate and to a method for manufacturing an electronic or optoelectronic device. The method of the invention comprises - providing an anode comprising electrolytically ionisable material and a cathode both in contact with an electrically conductive liquid, optionally comprising anions capable of forming a molecule with the electrolytically ionised material; - electrolytically oxidising the ionisable material under formation of cations that dissolve in the liquid; - evaporating the cations or said molecules of the cations and the anions from the liquid; and - depositing the cations or the molecules on the substrate.