Integrated circuit comprising PIN diodes

A semiconductor substrate (1) is provided with an "I" region (2) having intrinsic conductivity or a low doping of a first type of conductivity, which can be a low-doped epitaxial layer on a surface of the substrate. A PSUB well (3) of the first type of conductivity and a PIN region (4, 5)...

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Hauptverfasser: VESCOLI, VERENA, TEVA, JORDI, JONAK-AUER, INGRID
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creator VESCOLI, VERENA
TEVA, JORDI
JONAK-AUER, INGRID
description A semiconductor substrate (1) is provided with an "I" region (2) having intrinsic conductivity or a low doping of a first type of conductivity, which can be a low-doped epitaxial layer on a surface of the substrate. A PSUB well (3) of the first type of conductivity and a PIN region (4, 5) of the opposite second type of conductivity are implanted in the "I" region (2). Further components (7, 8, 9) of the integrated circuit are arranged in the PSUB well (3).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Integrated circuit comprising PIN diodes
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