Integrated circuit comprising PIN diodes

Integrated circuit comprising PIN diodes

A semiconductor substrate (1) is provided with an "I" region (2) having intrinsic conductivity or a low doping of a first type of conductivity, which can be a low-doped epitaxial layer on a surface of the substrate. A PSUB well (3) of the first type of conductivity and a PIN region (4, 5)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VESCOLI, VERENA, TEVA, JORDI, JONAK-AUER, INGRID
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor substrate (1) is provided with an "I" region (2) having intrinsic conductivity or a low doping of a first type of conductivity, which can be a low-doped epitaxial layer on a surface of the substrate. A PSUB well (3) of the first type of conductivity and a PIN region (4, 5) of the opposite second type of conductivity are implanted in the "I" region (2). Further components (7, 8, 9) of the integrated circuit are arranged in the PSUB well (3).