SINTERED FIBER FILTER

Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have...

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Bibliographische Detailangaben
Hauptverfasser:	ROMANO, Alfred, M, PFLUGBEIL, Todd, W, WHITE, Wayne, F, BURGESS, Derek, RUBOW, Kenneth, L, ROSENBERGER, John, E, BALAZY, Richard, D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CASTING MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POWDER METALLURGY SEPARATION TRANSPORTING WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	Sintered fiber filters are provided that can afford high particle capture efficiency and/or low pressure drop during operation, and are useful in applications such as semiconductor processing. The shape of at least a portion of the individual fibers (e.g., metal fibers) used to make the filter have a three-dimensional aspect, which allows for a low packing density and high porosity filtration media. Certain filters have a cylindrical or tube-like shape with tapered ends of higher density. Methods of making such filters, for example, using axial pressing, are also described.