Method of making a micro electro mechanical system (MEMS) device

Method of making a micro electro mechanical system (MEMS) device

A method of manufacturing a micro electro mechanical system (MEMS) device, comprising the steps of: providing a substrate, depositing an active layer, depositing a sacrificial layer, forming a MEMS structure in the active layer, wherein forming the MEMS structure comprises depositing a capping layer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KNOTTER, DIRK MARTEEN, ZIJLSTRA, PIEBE ANNE, VAN VELZEN, BART, VAN WEERT, JEROEN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Beschreibung
Zusammenfassung:A method of manufacturing a micro electro mechanical system (MEMS) device, comprising the steps of: providing a substrate, depositing an active layer, depositing a sacrificial layer, forming a MEMS structure in the active layer, wherein forming the MEMS structure comprises depositing a capping layer over the sacrificial layer, etching holes into the capping layer, removing the sacrificial layer with a dry etching process.