POLISHING DEVICE

The invention concerns a polishing arrangement (1) with a tool holder (3), at which a polishing tool is arranged and that interacts with a workpiece holder (5), the workpiece holder (5) and the tool holder (3) being movable in relation to one another in a first direction and in a second direction di...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LORENZEN, KIM, GROENBAEK, JENS
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The invention concerns a polishing arrangement (1) with a tool holder (3), at which a polishing tool is arranged and that interacts with a workpiece holder (5), the workpiece holder (5) and the tool holder (3) being movable in relation to one another in a first direction and in a second direction differing from the first direction. It is endeavored to make at least a part of the polishing process reproducible and documentable. For this purpose, in a third direction (20) that is perpendicular to the first (9) and second (10, 12) directions, the tool holder (3) is made to be flexible.