Electrode and method for electrolytic layer deposition

The total area of the electrode (2) is divided into separate faces (4) which are insulated from each other. Each face can be connected to an electrical potential. Connection to the faces is made individually, or in groups. It is made via a regulator and/or control unit (26). Opposite adjacent side a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: UELZEN, THORSTEN, ROSTAMI, BARDIA, KRUSE, JAN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The total area of the electrode (2) is divided into separate faces (4) which are insulated from each other. Each face can be connected to an electrical potential. Connection to the faces is made individually, or in groups. It is made via a regulator and/or control unit (26). Opposite adjacent side areas of different faces are separated by insulating joints or gaps. Alternatively the electrodes each have an electrically-insulating core (12) and/or carrier. The spacing (A) between two points on adjacent side surfaces or edges of faces is related to the deposition layer thickness (D), such that 2D is greater than or equal to A, and/or A exceeds D. The rear sides of the faces are connected to electrical lines individually or in groups. The electrode can be re-used after removal of a deposited polymer film. One or more faces have a maximum width of 50 mu m, especially 30-5 mu m. For plating, the electrode is brought into contact with the electrolyte. A controlled potential is applied to cause electrolytic plating onto designated surfaces from at least one opposite electrode. Material is deposited from the electrolyte. It coats only the designated surfaces. Materials which can be polymerized and/or cross-linked, especially monomers and/or metallic substances are introduced into the electrolyte. By variation of process parameters, the control unit determines the areas to be plated and areas in which little or no plating occurs. The controller determines: voltage magnitudes, current through the plating areas, its duration and the depth of plating. Line connections are used; these include one or more switches (32). Connection is grouped or individual. Control parameters are intentionally related to the location, properties, thickness, structure, shape and/or geometry of the layer deposited on the designated areas. An independent claim IS INCLUDED FOR the method of deposition. Erfindungsgemäß ist eine Elektrode für ein elektrolytisches Abscheidungsverfahren, dadurch gekennzeichnet, dass die Elektrode mehrere, voneinander elektrisch isolierend getrennte Teiloberflächen aufweist und dass die Teiloberflächen einzeln oder gruppenweise durch eine Regel- und/oder Steuereinheit mit einem elektrischen Potential verbindbar sind.