Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same

Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same

A surface acoustic wave ("SAW") element includes a substrate which is formed of a piezoelectric material, a plurality of first electrodes which are disposed on the substrate and separated from each other, a plurality of second electrodes which are disposed on the substrate and are separate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, KIEUN, LEE, SOOSUK, LEE, HUN JOO, PARK, CHINSUNG
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
RESONATORS
TESTING
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Beschreibung
Zusammenfassung:A surface acoustic wave ("SAW") element includes a substrate which is formed of a piezoelectric material, a plurality of first electrodes which are disposed on the substrate and separated from each other, a plurality of second electrodes which are disposed on the substrate and are separated from the first electrodes and are separated from each other, and oxide films which are disposed on the respective plurality of first electrodes and the plurality of second electrodes.