A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supp...

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Bibliographische Detailangaben
Hauptverfasser: SANDERS, REMCO, BERENSCHOT, JOHAN WILLEM, MOGULKOC, BERKER, ELWENSPOEK, MICHAEL CURT, UNNIKRISHNAN, SANDEEP, FAZAL, IMRAN, JANSEN, HENRICUS VENANTIUS, DE BOER, MEINT JELLE, LOUWERSE, MARCUS CORNELIS
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.