Method of manufacturing inkjet printhead

A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Park, Jong-jin, Kim, Jin-baek, Yoon, Yong-seop, Park, Byung-ha, Ha, Yong-ung, Kim, Su-min
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composition that is used to form at least one of a channel forming layer and a nozzle layer.