Micromechanical element with reduced stress in the membrane structure

The component has a rigid cover layer (16) arranged over a membrane (1) and at a distance to the membrane. The cover layer has an access opening (4) for the membrane, so that the membrane is subjected with pressure over the access opening and is flexibly movable perpendicular to layer-plane. A measu...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SCHELLING, CHRISTOPH, BENZEL, HUBERT
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The component has a rigid cover layer (16) arranged over a membrane (1) and at a distance to the membrane. The cover layer has an access opening (4) for the membrane, so that the membrane is subjected with pressure over the access opening and is flexibly movable perpendicular to layer-plane. A measuring electrode (3) is formed as a component of an evaluation circuit for detecting the membrane displacement. A compensation circuit is provided with the measuring electrode and an auxiliary electrode for compensating mechanical stresses in the membrane.