Particle optical corrector for axial and off-axis beam path
The particle-optical system corrector (1) comprises corrector pieces (10,20) that are successively arranged in a beam path (2) of an optical axis (3). The quadrupole fields of all four multipole elements (11,12,13,14,21,22,23,24) are turned at 90 degrees from one to the next. A central multipole ele...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | The particle-optical system corrector (1) comprises corrector pieces (10,20) that are successively arranged in a beam path (2) of an optical axis (3). The quadrupole fields of all four multipole elements (11,12,13,14,21,22,23,24) are turned at 90 degrees from one to the next. A central multipole element (4), which is lying in a center plane (5) of an octupole field, is generated for eliminating a third-order astigmatism. An independent claim is included for a transmission electron microscope. |
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