PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE

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Hauptverfasser:	SCHWAER, JOCHEN, RIEF, KLAUS, SCHOEPPACH, ARMIN, HOEGELE, ARTUR, BERTELE, ANDREAS, FROMMEYER, ANDREAS, SCHWAER, BAERBEL, BECKENBACH, MARIELLA, SIGEL, BENJAMIN, BLEIDISTEL, SASCHA, GRUNER, TORALF, SCHLETTERER, THOMAS, HUMMEL, WOLFGANG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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