SILICON PRODUCTION WITH A FLUIDIZED BED REACTOR INTEGRATED INTO A SIEMENS-TYPE PROCESS

SILICON PRODUCTION WITH A FLUIDIZED BED REACTOR INTEGRATED INTO A SIEMENS-TYPE PROCESS

A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.

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Bibliographische Detailangaben
Hauptverfasser: MOLNAR, MICHAEL, ARVIDSON, ARVID NEIL
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.