METHOD AND DEVICE FOR PRODUCING A COATING

The present invention relates to a coating device, comprising a plasma generating chamber with a housing for the collection of the plasma produced therein, a nozzle duct formed by the housing with an outlet from the housing, an electrode arranged in the nozzle duct, an ionized gas inlet for the inle...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IHDE, Jörg, WÜBBEN, Thomas, LOMMATZSCH, Uwe, DEGENHARDT, Jost, SALZ, Dirk
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present invention relates to a coating device, comprising a plasma generating chamber with a housing for the collection of the plasma produced therein, a nozzle duct formed by the housing with an outlet from the housing, an electrode arranged in the nozzle duct, an ionized gas inlet for the inlet of a gas to be ionized in the plasma generating chamber with a volume flow of 15 to 50 l/min, a relaxation chamber, comprising a precursor feed, being spaced 1 to 25 mm, preferably 1 to 7 mm from the outlet of the housing of the plasma generating chamber.