METHOD AND DEVICE FOR PRODUCING A COATING
The present invention relates to a coating device, comprising a plasma generating chamber with a housing for the collection of the plasma produced therein, a nozzle duct formed by the housing with an outlet from the housing, an electrode arranged in the nozzle duct, an ionized gas inlet for the inle...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The present invention relates to a coating device, comprising a plasma generating chamber with a housing for the collection of the plasma produced therein, a nozzle duct formed by the housing with an outlet from the housing, an electrode arranged in the nozzle duct, an ionized gas inlet for the inlet of a gas to be ionized in the plasma generating chamber with a volume flow of 15 to 50 l/min, a relaxation chamber, comprising a precursor feed, being spaced 1 to 25 mm, preferably 1 to 7 mm from the outlet of the housing of the plasma generating chamber. |
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