High-capacitance density thin-film dielectrics having columnar grains formed on base-metal foils

Deposited thin-film dielectrics having columnar grains and high dielectric constants are formed on heat treated and polished metal foil. The sputtered dielectrics are annealed at low oxygen partial pressures.

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Bibliographische Detailangaben
Hauptverfasser: REARDON, DAMIEN FRANCIS, ZHIGANG, RICK LI, PALANDUZ, CENGIZ AHMET, RYLEY, JAMES F, BAO, LIJIE
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Deposited thin-film dielectrics having columnar grains and high dielectric constants are formed on heat treated and polished metal foil. The sputtered dielectrics are annealed at low oxygen partial pressures.