FLEXIBLE MICRO/NANOFLUIDIC DEVICES

A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components...

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Bibliographische Detailangaben
Hauptverfasser:	EZKERRA FERNÁNDEZ, Aitor, SCHULZE, Janette Lilian María, MAYORA ORIA, Kepa, BLANCO BARRO, Fco. Javier, AGUIRREGABIRIA IZAGUIRRE, María, RUANO LÓPEZ, Jesús Miguel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY HUMAN NECESSITIES HYGIENE MEDICAL OR VETERINARY SCIENCE MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A micro-nanofluidic device is fabricated by depositing photo-curable resin (5) from heat set polymer (3) on 2 substrates (1) (capsule 1 and capsule 2) of polymeric material (2); carrying out photolithography at low temperature to the layers of photo-curable resin; depositing metallic-type components (4) in the capsule; micro-structuring the deposited metallic components; depositing a layer of photo-curable resin from heat set polymer on capsule 1; carrying out photolithography; sealing the obtained capsules; and cutting the device.