MEASURING SCANNING PROBE FOR SCANNING THE SURFACE TO BE MEASURED

MEASURING SCANNING PROBE FOR SCANNING THE SURFACE TO BE MEASURED

A measuring scanning probe for scanning a surface to be measured, including a stylus so as to provide a measuring point at a first end of the stylus for scanning the surface to be measured and a base part that is to be fixedly connected to a scanning device. The stylus is movably suspended from the...

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Hauptverfasser: BOS, EDWIN, JOHANNES, CORNELIS, BURGER, GERARDUS, JOHANNES
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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creator BOS, EDWIN, JOHANNES, CORNELIS
BURGER, GERARDUS, JOHANNES
description A measuring scanning probe for scanning a surface to be measured, including a stylus so as to provide a measuring point at a first end of the stylus for scanning the surface to be measured and a base part that is to be fixedly connected to a scanning device. The stylus is movably suspended from the base part by one or more bending elements. The measuring scanning probe is substantially planar in shape. The stylus, the one or more bending elements, and the base part are located in a single main plane of the planar measuring scanning probe.
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subjects APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
title MEASURING SCANNING PROBE FOR SCANNING THE SURFACE TO BE MEASURED
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