MEASURING SCANNING PROBE FOR SCANNING THE SURFACE TO BE MEASURED

A measuring scanning probe for scanning a surface to be measured, including a stylus so as to provide a measuring point at a first end of the stylus for scanning the surface to be measured and a base part that is to be fixedly connected to a scanning device. The stylus is movably suspended from the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BOS, EDWIN, JOHANNES, CORNELIS, BURGER, GERARDUS, JOHANNES
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A measuring scanning probe for scanning a surface to be measured, including a stylus so as to provide a measuring point at a first end of the stylus for scanning the surface to be measured and a base part that is to be fixedly connected to a scanning device. The stylus is movably suspended from the base part by one or more bending elements. The measuring scanning probe is substantially planar in shape. The stylus, the one or more bending elements, and the base part are located in a single main plane of the planar measuring scanning probe.