COATING FOR GAS BEARINGS

COATING FOR GAS BEARINGS

Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also...

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Hauptverfasser: BLUMENTHAL, ROLAND, FROITZHEIM, MICHAEL
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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creator BLUMENTHAL, ROLAND
FROITZHEIM, MICHAEL
description Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also included for a method for the production of a gas bearing for a vacuum pump.
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language eng ; fre ; ger
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source esp@cenet
subjects BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title COATING FOR GAS BEARINGS
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