COATING FOR GAS BEARINGS

Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also...

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Bibliographische Detailangaben
Hauptverfasser:	BLUMENTHAL, ROLAND, FROITZHEIM, MICHAEL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also included for a method for the production of a gas bearing for a vacuum pump.