Controlling and moderating microwave energy in high-throughput chemical processes

A system for microwave assisted high-throughput chemical processes is disclosed. The system includes a source of microwave radiation (63,64), a microwave cavity (65) in communication with the source, and a microtiter plate (66) in the cavity. The microtiter plate (66) is formed of a microwave transparent material and includes a plurality of sample wells (67). A fluid chamber is defined by the interior of the four walls, the base, the profiles of the wells, and by the top surface of the microtiter plate (66). A microwave-moderating fluid in the chamber helps produce a more uniform microwave field among the individual wells in the microtiter plate (66) when microwaves are applied in the cavity (65) from the source (63,64). The microtiter plate may be cooled during the application of microwaves by either flowing a cooling gas (72) or by contact cooling (73).