LASER FUSE STRUCTURES FOR HIGH POWER APPLICATIONS

The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements (12a, 12b), at least one conductive fusible link (14), first and second connection elements (...

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Bibliographische Detailangaben
Hauptverfasser: GRECO, STEPHEN, EDWARD, JUNG, DAE-YOUNG, MCLAUGHLIN, PAUL, STEPHEN, ROHRER, NORMAN, JAY, HEDBERG, ERIK, LEIGH, MUZZY, CHRISTOPHER, DAVID, WYNNE, JEAN, ELIZABETH
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements (12a, 12b), at least one conductive fusible link (14), first and second connection elements (20a, 20b), and first and second metal lines (22a, 22b). The conductive supporting elements (12a, 12b), the conductive fusible link (14), and the metal lines (22a, 22b) are located at a first metal level (3), while the connect elements (20a, 20b) are located at a second, different metal level (4) and are connected to the conductive supporting elements (12a, 12b) and the metal lines (22a, 22b) by conductive via stacks (18a, 18b, 23a, 23b) that extend between the first and second metal levels (3, 4).