APPLICATOR AND METHOD OF MOVING DISPERSION LIQUID

The present invention provides applicators reducing generating bubble. A dispersion liquid is supplied while the pressure of a circulation tank 31L on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks 41a to 41c. The dispersion liquid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAMEKAWA, TAKUMI, TAFF, ROBERT D, BABA, KEI, INOUE, YUYA, FOX, RALPH D, HANE, KOJI, MURATA, MASAO, MCKAY, ROBERT R
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present invention provides applicators reducing generating bubble. A dispersion liquid is supplied while the pressure of a circulation tank 31L on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks 41a to 41c. The dispersion liquid in the discharge chambers 42a to 42c is recovered while the pressure in a circulation tank 31R serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.