MEMS SWITCH CONTACT SYSTEM

A MEMS switch has 1) a first contact, and 2) a second contact that is movable relative to the first contact. At least one of the contacts is electrically conductive and has a platinum-series based material.

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Bibliographische Detailangaben
Hauptverfasser: DIXON, JOHN, SCHIRMER, MARK
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A MEMS switch has 1) a first contact, and 2) a second contact that is movable relative to the first contact. At least one of the contacts is electrically conductive and has a platinum-series based material.