MEMS SWITCH CONTACT SYSTEM
A MEMS switch has 1) a first contact, and 2) a second contact that is movable relative to the first contact. At least one of the contacts is electrically conductive and has a platinum-series based material.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A MEMS switch has 1) a first contact, and 2) a second contact that is movable relative to the first contact. At least one of the contacts is electrically conductive and has a platinum-series based material. |
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