SYSTEM TO TRANSFER A TEMPLATE TRANSFER BODY BETWEEN A MOTION STAGE AND A DOCKING PLATE

The present invention is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart 'from the docking plate a first distance; and a body, having first an...

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Bibliographische Detailangaben
Hauptverfasser:	SCHUMAKER, PHILIP, D, KIM, JAE, H, FANCELLO, ANGELO, BABBS, DANIEL, A, CHOI, BYUNG-JIN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The present invention is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart 'from the docking plate a first distance; and a body, having first and second opposed sides spaced- apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.