Scanning probe microscope

The invention relates to a scanning probe microscope comprising: - a specimen holder holding a specimen; and - a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Roesthuis, Frank Johan Gerhardus, Broekmaat, Joska Johannes, Rijnders, Augustinus Josephus Helena Maria, Blank, David Hermanus Adrianus
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	The invention relates to a scanning probe microscope comprising: - a specimen holder holding a specimen; and - a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.