THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME

THIN FILM PIEZOELECTRIC RESONATOR AND METHOD OF MANUFACTURING THE SAME

A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cav...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ITAYA, KAZUHIKO, YASUMOTO, TAKAAKI, SANO, KENYA, YANASE, NAOKO, OHARA, RYOICHI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Beschreibung
Zusammenfassung:A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a periphery partially overlapping on the cavity and tapered to have an inner angle of 30 degrees or smaller defined by a part of the periphery thereof and a bottom thereof.