Circulated cooled target

Through inlets (15,16), a liquid and a gas are constantly filled into a target chamber of a target. Then the liquid and the gas flow around the chamber via channels (14,33) and subsequently are flown out via outlet (25). By doing so, the target is effectively cooled down.

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Bibliographische Detailangaben
Hauptverfasser:	LIN, WUU-JYH, CHANG, MAO-HSUNG, CHEN, JENN-TZONG, CHU, KUO-YUAN, DUH, TING-SHIEN, CHEN, DOW, HUANG, PING-YEN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Through inlets (15,16), a liquid and a gas are constantly filled into a target chamber of a target. Then the liquid and the gas flow around the chamber via channels (14,33) and subsequently are flown out via outlet (25). By doing so, the target is effectively cooled down.