METHOD AND ASSEMBLY FOR CONFOCAL, CHROMATIC, INTERFEROMETRIC AND SPECTROSCOPIC SCANNING OF OPTICAL, MULTI-LAYER DATA MEMORIES

The method involves transmitting light from a multi-wavelength source (1a) and providing an interferometer that is associated with chromatic-confocal microscopic technology. A spectrometer (100) is arranged in front of a screened receiver (11) in which a microscopic image of inside of a memory is re...

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Bibliographische Detailangaben
Hauptverfasser: KOERNER, KLAUS, WIESENDANGER, TOBIAS, PRUSS, CHRISTOF, RUPRECHT, AIKO, DROSTE, ULRICH, KOHLER, CHRISTIAN, OSTEN, WOLFGANG, BERGER, REINHARD
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The method involves transmitting light from a multi-wavelength source (1a) and providing an interferometer that is associated with chromatic-confocal microscopic technology. A spectrometer (100) is arranged in front of a screened receiver (11) in which a microscopic image of inside of a memory is received and a diffractive optical zone lens (5) is provided inside a focusing system.