CHUCKING SYSTEM FOR NANO-MANUFACTURING

The present invention is directed towards a method of separating a mold, including a template (10), from a layer (12) disposed on a substrate (14), the method including applying a separation force to the template (Fs) to separate the template from the layer; and facilitating localized deformation in...

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Bibliographische Detailangaben
Hauptverfasser:	BABBS, DANIEL, A, CHERALA, ANSHUMAN, CHOI, BYUNG-JIN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURESCONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER TRANSPORTING WORKING CEMENT, CLAY, OR STONE
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Beschreibung
Zusammenfassung:	The present invention is directed towards a method of separating a mold, including a template (10), from a layer (12) disposed on a substrate (14), the method including applying a separation force to the template (Fs) to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.