MICRO ELECTROMECHANICAL DEVICE FOR TILTING A BODY IN TWO DEGREES OF FREEDOM

The invention relates to a micro electromechanical device ( 1 ') for tilting a body ( 2 ) in two degrees of freedom comprising a carrier element ( 3 ) and a membrane ( 4 ), the body ( 2 ) being connected via the membrane ( 4 ) to the carrier element ( 3 ), wherein the body ( 2 ) and the carrier...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN LIEROP, DIEDERIK, ASJES, RONALD, J, VAN GRUNSVEN, ERIC, C., E, MEUWESE, MARK, T, JANSEN, GERARDUS, L., M, BROUWER, DANNIS, M
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!