MICRO ELECTROMECHANICAL DEVICE FOR TILTING A BODY IN TWO DEGREES OF FREEDOM

The invention relates to a micro electromechanical device ( 1 ') for tilting a body ( 2 ) in two degrees of freedom comprising a carrier element ( 3 ) and a membrane ( 4 ), the body ( 2 ) being connected via the membrane ( 4 ) to the carrier element ( 3 ), wherein the body ( 2 ) and the carrier...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	VAN LIEROP, DIEDERIK, ASJES, RONALD, J, VAN GRUNSVEN, ERIC, C., E, MEUWESE, MARK, T, JANSEN, GERARDUS, L., M, BROUWER, DANNIS, M
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to a micro electromechanical device ( 1 ') for tilting a body ( 2 ) in two degrees of freedom comprising a carrier element ( 3 ) and a membrane ( 4 ), the body ( 2 ) being connected via the membrane ( 4 ) to the carrier element ( 3 ), wherein the body ( 2 ) and the carrier element ( 3 ) each comprise at least one electrode ( 5,6 ). The body ( 2 ) is tilted by means of electrostatic forces ( 7 ) between the at least one electrode ( 5 ) of the body ( 2 ) and the at least one electrode ( 6 ) of the carrier element ( 3 ) by an application of a voltage (V1,V2) to said electrodes ( 5,6 ) from a voltage source.