Electromagnetic micro-generator
A micro-generator comprises an integrated circuit (IC) wafer. A micro-electro mechanical system (MEMS) wafer is bonded to the IC wafer and comprises a micromechanical element arranged to move in use. A plurality of first metal coils with associated plural trenches are realised as part of the IC wafe...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A micro-generator comprises an integrated circuit (IC) wafer. A micro-electro mechanical system (MEMS) wafer is bonded to the IC wafer and comprises a micromechanical element arranged to move in use. A plurality of first metal coils with associated plural trenches are realised as part of the IC wafer and/or the MEMS wafer. Plural micro-magnets are provided, one associated with each trench and are formed from a magnet layer deposited, plated or bonded to the MEMS wafer or IC wafer. Movement of the micro-mechanical element, in use, generates a voltage in the coils. |
---|