LINE NARROWING MODULE

A line narrowing module (28) for a gas discharge laser producing a pulsed light beam comprising: a grating (22) mounted along an optical path of the line narrowing module (28), selecting at least one center wavelength for the pulsed light beam as determined at least in part by an angle of incidence...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KULGEYKO, Vladimir, A, ALGOTS, Martin, J, GILLESPIE, Walter, D, BERGSTEDT, Robert, A, SANDSTROM, Richard. L, DYER, Timothy, S, PARTLO, William, N, RYLOV, German, E, STRATE, Brian, D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A line narrowing module (28) for a gas discharge laser producing a pulsed light beam comprising: a grating (22) mounted along an optical path of the line narrowing module (28), selecting at least one center wavelength for the pulsed light beam as determined at least in part by an angle of incidence of the pulsed light beam on the grating (22); a beam expander prism assembly (64) comprising three or more prisms (82, 84, 86, 88) including: a first prism ( 82)moveable to select an angle of incidence of the pulsed light beam on the grating (22) and having a relatively larger impact on the angle of incidence; and a second prism (84) moveable to select an angle of incidence of the pulsed light beam on the grating (22) and having a relatively smaller impact on the angle of incidence; wherein the first prism (82) has a magnification that is larger than the magnification of the second prim (84); and a controller configured to control the movement of the first (82) and second (84) prisms based on feedback from a center wavelength detector that detects a center wavelength of the pulsed light beam.