METHOD OF SHAPING LITHOGRAPHICALLY-PRODUCED PROBE ELEMENTS

A method is provided for shaping tips of lithographically-produced probe elements configured for use in a probe card to establish electrical communication with a contact of a semiconductor device to be tested. The method includes (a) lithographically producing a plurality of probe elements and (b) u...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TUNABOYLU, BAHADIR, MALANTONIO, EDWARD, L
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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